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                              圖形化襯底DPSS

                              2014-09-02

                              2"DPSS

                              Inspection

                              Item

                              Detail

                              Spec

                              Description

                              SEM
                              Image
                              Inspection

                              Width

                              Average

                              2.70±0.15um

                              Flat-top shaped pattern not allowed

                              Unif.

                              5%

                              Height

                              Average

                              1.65±0.15um

                              Unif.

                              5%

                              Scope Inspection

                              Particle

                              50um*

                              100ea

                              No visible particle on wafer
                              The total lens should be less than 3mm

                              [50um,250um]*

                              30ea

                              [250um,500um]*

                              20ea

                              [500um,1500um]*

                              10ea

                              1500um*

                              0

                              Pattern Missing

                              50um*

                              80ea

                              The total length shoud be less than 2mm

                              [50um,250um]*

                              30ea

                              [250um,500um]*

                              15ea

                              [500um,1500um]*

                              8ea

                              1500um*

                              0

                              Pattern Fail

                              50um*

                              80ea

                              [50um,250um]*

                              30ea

                              [250um,500um]*

                              15ea

                              [500um,1500um]*

                              8ea

                              1500um*

                              0

                              Scratch

                              1.2mm

                              7ea

                              width60um and lenth1.2mm should be judged as 1ea
                              if the pattern link happenes in the nearest 20 patternes area from the scratch,the pattern link should not be counted

                              Edge Bead

                              Edge Bead

                              1.8mm

                              The pattern failed within the 1.8mm area from the wafer edge should not be counted
                              The non-pattern area should be less than1mm from the wafer edge

                              Abnormal Shape

                              Abnormal Shape

                              3%

                              Total area of abormal shape pattern should be less than 3%

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