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                              6寸藍寶石襯底

                              2018-10-29

                              藍寶石晶片

                              Item

                              6"

                              Unit

                               Dimension

                              Diameter:

                              150 ± 0.2

                              mm

                              Thickness:

                              1300 ± 20

                              um

                              Primary Flat:

                              47.51.0

                              mm

                              Orientation

                              Surface-cut:

                              C plane : Tilt 0.2°±0.1° in M axis /

                              ~

                              Primary Flat:

                              A plane : 0° ± 0.15°

                              ~

                              Flatness

                              Bow:

                               0 ~ (-10)

                              um

                              Warp:

                               20

                              um

                              Total Thickness Variation (TTV):

                               10

                              um

                              LTV

                              2.5

                              um

                              Front side Roughness

                              0.2

                              nm

                              Back side Roughness

                              0.8-1.2

                              um

                              Cleanliness

                              No particles and fingerprints

                              ~

                              4.Material Quality

                              High-purity mono-crystal Al2O3

                              ~

                              5.Package

                              Wafers are packed in cleaned wafer cassettes containing 25 wafers under clean room environment.

                              ~

                              6.Trace Ability

                              Wafers shall be traceable with respect to cassette number. The wafer box should be marked with a removable label showing the date, the cassette number and the quantity.

                              ~

                              7.Laser Mark

                              Front or Back side

                              ~


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